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Jun 18th, 2010
FOGALE nanotech introduces MEMSCAN 200
The first inspection & metrology solution fully dedicated to MEMS manufacturing.
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MEMSCAN Fogale nanotech
MEMSCAN Fogale nanotech
The MEMSCAN has been developed in partnership with MEMS manufacturers to fit perfectly with MEMS manufacturing requirements for surface micromachining and Wafer Level packaging process control. Both Metrology and IR inspection are performed in one shot with one tool.

MEMSCAN uses patented optical device which combines low coherence infrared interferometric technology and infra red microscopy. MEMSCANprovides accurate membrane thickness mapping and uniformity for all kind of materials transparent to NIR and through silicon cap membrane thickness and shape control. The advanced vision device (IR transmission) is designed to perform MEMS device inspection and to detect visual defects even after wafer level packaging. The automatic focus and auto contrast combined with the image enhancement software improve the image quality. The visual defects are detected by comparison with a reference die.

Thanks to the partnership with MEMS manufacturers, the MEMSCANhas been optimized to fit perfectly with MEMS wafers. The edge contact vacuum chuck protects the cleanness of wafers on both sides. In engineering mode, the software allows the engineers to define die dimensions, die mapping for the full substrate combined with layer definition to create easily a recipe for production mode. In production mode, the user gets a complete view of the tool configuration and state on one page. Results can be exported to a local network. 2D, 3D view of membrane thickness combined with IR pictures can be visualized on the tool itself or on the stand alone FOGALE analysis station.

MEMSCAN includes a calibrated sapphire standard for control purpose. Before each measurement sequence, the optical head moves above the standards and perform a measurement control (6 sigma approach) to avoid any metrology issue. FOGALE engineers are always using failure modes and effects analysis (FMEA) approach to deliver robust metrology solutions.
Semiconductor dept. Manager

Phone +33 (0)4 66 62 05 55
Cell +33 (0)6 84 13 38 31
Fax. +33 (0)4 66 62 71 60


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