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Jun 25th, 2010
MEMFIS – an out of plane translatory MEMS actuator with large stroke for optical path length modulation
Fourier Transform Infrared (FT-IR) spectroscopy is a widely used method to analyze different materials - organic and inorganic. Current FT-IR spectrometers are large, usually not portable, and often require operation by specially qualified personnel. By using translational MOEMS devices for optical path length modulation instead of conventional highly shock sensitive mirror drives a new class of miniaturized, robust, high speed and cost efficient FTIR-systems is enabled.
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At Micromachine/MEMS 2010, in Tokyo, Fraunhofer IPMS presen¬ts for the first time a translatory MOEMS actuator with extraordinary large stroke– especially developed for fast optical path length modulation in miniaturized FTIR-spectrometers. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1 mm and large mirror aperture of 19.6 mm² is realized by means of a new MEMS design. The novel translatory MOEMS actuator was specially designed to enable a miniaturized MEMS based FTIR spectrometer with improved system performance of 5 cm-1 spectral resolution (Lambda=2.5…16 µm), SNR > 1000 and fast operation of ≥500 scans/s.

The new translatory MEMS actuator comprises four symmetric pantographs to suspend the mirror plate. As a result extraordinary large strokes of up to +/- 1 mm are achieved for the 5 mm diameter mirror. This enables a completely new family of low cost handheld FTIR analyzers e.g. for on-site inspection of food or environmental parameters. We acknowledge financial support by the European Commission in the context of the FP7 project MEMFIS.


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