SPTS starts on a high with Q4 2009 orders up nearly 150%
The new orders included etch, CVD, and PVD single wafer tools for a variety of customers in the MEMS, TSV, and compound semiconductor industries booked by the Newport Wales based UK Division, as well as furnaces, upgrades, and an APCVD system booked by the newly formed Thermal...

Tegal Corporation reports third quarter Fiscal 2010 financial results
Third Quarter Highlights
•    Third quarter revenues reached their highest level since the fourth fiscal quarter of 2008, continuing a steady quarterly increase since the beginning of the Company's current fiscal year.