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> MEMS TECHNO
Mar 1st, 2011
ADI ups ante in high-precision MEMS gyros
Already known for its high-precision micro-electro-mechanical system (MEMS) accelerometers, gyroscopes and complete inertial navigation units (IMUs), Analog Devices Inc.
(ADI) has upped the ante for high-precision with its invention of quad-differential iMEMS gyros, which combine four separate sensing elements to cancel out the effects of vibration, noise and other environmental stimuli. MEMS gyroscopes use a vibrating "proof mass" suspended on silicon springs which harnesses the Coriolis effect to detect rotation orthogonal to its motion with capacitive sensors around its edges. Unfortunately, vibration, shock and excessive linear acceleration can fool a single proof mass into falsely reporting rotational motion. To cancel out these effects, ADI already had dual-differential proof masses on its previous high-precision gyros, but now has taken a significant step forward by going quad. "We call it the quad-differential sensor, because there are four proof masses that prevent the gyro from being lured into sensing movement that is not really there," said Wayne Meyer, marketing and applications manager at ADI's MEMS/Sensors Technology Group. "Previously we used two proof masses in a differential configuration—moving in opposite directions—for our high precision gyros, but this new family takes that concept even further with four proof masses to cancel out erroneous signals." Sources :
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