Beneq, a global supplier of thin film coating equipment, announces the availability of an R&D thin film encapsulation system for 200×200 mm OLED substrates.
- The ALD encapsulation R&D system will be delivered in the summer of 2013
The first system will be delivered in the summer of 2013 as part of an atomic layer deposition (ALD) project to the German-based Fraunhofer COMEDD.
This research platform has been specifically designed together with the Fraunhofer Research Institution for Organics, Materials and Electronic Devices, known as COMEDD, which is an independent research institution of the Fraunhofer-Gesellschaft. Fraunhofer COMEDD offers a wide range of research, development and pilot production possibilities, especially for OLED lighting, organic solar cells and OLED microdisplays.
What makes the Beneq OLED thin film encapsulation system unique from a technical point of view is that it is based on a cross-flow reactor, which has been optimized for the shortest possible cycle time, even at low processing temperatures, such as <100 °C. This feature facilitates rapid prototyping of new OLED designs. Most importantly, the cross-flow reactor design enables process scale-up for large areas and high throughput, which is compatible with industrial requirements. The R&D system for 200×200 mm substrates is available as a stand-alone system and it can also be integrated with an MBraun glove box.
Beneq has been invited as a sponsor and speaker at Fraunhofer COMEDD’s first Industry Partners Day, which takes place in Dresden, Germany, on April 10, 2013. The ALD encapsulation R&D system will be delivered in the summer of 2013.