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Jul 19th, 2013
Brewer Science: Simpler bonding/debonding process needed
ZoneBond technology from Brewer Science to enable bonding and debonding process for 3D integration.
In 3D integration, wafers are thinned, stacked and connected to one another with through silicon vias (TSVs). The process of wafer thinning and TSV formation typically involves the use of a wafer bonding/debonding technology, where the wafers are bonded onto a carrier substrate – either silicon or glass – processed, and then debonded. The bonding/debonding step can be tricky because the bond has to be strong enough to withstand relatively high temperature processes and polishing steps, but not so strong as to make debonding difficult. It’s also critical that minimal stress be introduced to the device wafer during the debonding step (which can involve sliding or peeling), and that no residue remain. Room temperature debonding is also desirable.
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