SolMateS and SINTEF start close collaboration on PiezoMEMS development.
SolMateS has received an order from SINTEF (Oslo, Norway) for its PiezoFlare 1200 Pulsed Laser Deposition (PLD) system. The system is scheduled for delivery in January 2013 and will be used for deposition of Piezoelectric materials (PZT) for development and pre-production of next generation MEMS applications.
"We are very pleased with SINTEF as launching customer, this order comes with a close collaboration between SolMateS and SINTEF to optimize our machine and process in their development line for multiple new MEMS applications". commented Arjen Janssens. "The combination of our innovative tool and their expertise in PiezoMEMS development gives rise to a state-of-the-art PiezoMEMS centre in Europe".
About the PiezoFlare 1200
The PiezoFlare 1200 is a revolutionary manufacturing technology to produce chips with precise actuation functionality for various new applications like, inkjet printheads, pico projectors, RF MEMS and various sensing applications. The PiezoFlare 1200 is an automated deposition system for PZT thin films on 6" or 8" wafers, based on pulsed laser deposition. The technology uses a laser to create a plasma of the to be deposited material, this has several significant advantages for the deposition of the new generation materials. The fully automated tool offers high-yield piezo performance and flexibility for customized PZT compositions and can also be used for other More than Moore materials.
SolMateS is a fast growing and ambitious company with 20 employees, located at Science Park Twente, in Enschede, the Netherlands. A spin-off of MESA+ Institute of Nanotechnology. SolMateS has brought a lab scale technology (pulsed laser deposition) towards the production arena. This technology enables the deposition of new generation materials for the More than Moore applications, like Piezoelectric PZT. SolMateS has already been awarded with several technology and business awards since its launch in 2006. For more information, visit SolMateS' website at www.solmates.nl.
SINTEF is the largest independent research organization in Scandinavia with over 2100 employees and annual sales of NOK 2,8 billion (380 million €). SINTEF is a multidisciplinary non-commercial organization with expertise in natural sciences and technology, environment, health and social science and provides contract research for Norwegian and international customers. SINTEF's ambition is to create value for customers through knowledge generation, research and innovation, and development of sustainable technological solutions. Operating profits are invested in new research, scientific equipment and competence development. For more information visit SINTEF's website at www.sintef.no. The department of Microsystems and Nanotechnology, SINTEF MiNaLab, provides services (R&D and small scale production) in silicon processing and device fabrication. By combining leading expertise in PZT material and processing technology, SINTEF has become a major player in Europe in the field of PiezoMEMS and PZT integration in MEMS. SINTEF aims at establishing a PiezoMEMS competence center to serve industry, promote the development of production processes and to develop innovative products.