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Mar 15th, 2013
Imec offers fully integrated silicon photonics platform in a multi-project wafer service
Imec announced the launch of its fully integrated silicon photonics platform through a cost-sharing Multi-Project Wafer (MPW) service via ePIXfab*.
The platform enables cost-effective R&D of silicon photonic ICs for high-performance optical transceivers (25Gb/s and beyond) and optical sensing and life science applications. The offered integrated components include low-loss waveguides, efficient grating couplers, high-speed silicon electro-optic modulators and high-speed germanium waveguide photo-detectors.
Imec’s Si Photonics 200mm wafer platform offers extensive design flexibility and includes – Tight within-wafer silicon thickness variation 3s < 2.5nm 3-level patterning of 220nm top Si layer (193nm optical lithography) poly-Si overlay and patterning (193nm optical lithography) 3-level n-type implants and 3-level p-type implants in Si Ge epitaxial growth on Si and p-type and n-type implants in Ge Local NiSi contacts, Tungsten vias and Cu metal interconnects Al bond pads Validated cell library with fiber couplers, polarization rotators, highly efficient carrier depletion modulators and ultra-compact Ge waveguide photo-detectors with low dark current.
Design kit support for Ipkiss, PhoeniX and Mentor Graphics software
ePIXfab is a consortium of partners coordinated by imec-UGent partnership. Other members of the consortium are CEA-LETI (France), IHP (Germany) TNO (Netherlands), Tyndall (Ireland), VTT (Finland) and CMC Microsystems (Canada); providing together diverse expertise from design to packaging thus supporting the emergence of a fabless ecosystem in Silicon Photonics. For more information, visit www.epixfab.eu
Imec is a registered trademark for the activities of IMEC International (a legal entity set up under Belgian law as a "stichting van openbaar nut”), imec Belgium (IMEC vzw supported by the Flemish Government), imec the Netherlands (Stichting IMEC Nederland, part of Holst Centre which is supported by the Dutch Government), imec Taiwan (IMEC Taiwan Co.) and imec China (IMEC Microelectronics (Shangai) Co. Ltd.) and imec India (Imec India Private Limited).
The mission of the Department of Information Technology (Intec) of Ghent University is to provide high quality education from ungraduate to postgraduate level based on excellent research. To obtain this excellence on an international level Intec focuses its research effort on carefully chosen domains so as to achieve a critical density in each of them. In the physical layer Intec has a strong focus on nanophotonic components and more particularly silicon photonics.
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