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Mar 20th, 2014
Join the one day workshop on Nanoscale Processing for MEMS and NEMS
Powered by Oxford Instruments Plasma Technology and hosted by IEMN - Tuesday 8th April 2014, Lille, France
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This workshop will discuss developments and future trends in MEMS and NEMS micro & nano structures and devices. It is open to all those people working in industry and academia, with an interest in recent progress in research and development, plus future trends in the fabrication and application of MEMS and NEMS devices. Eric Mounier, Seniot analyst at Yole Développement, will present on: "Looking towards the next generation of MEMS devices"


8.30-9.00 - Registration & Coffee

9.00-9.30 - Welcome & Introduction to Oxford Instruments,David Haynes, Oxford Instruments
Welcome & Introduction to IEMN, IEMN

- Nanoscale Etch, Mark McNie, Oxford Instruments

- ALD for MEMS, Harm Knoops, TU Eindhoven / Oxford Instruments

10.15-10.40 - Break & posters

10.40-11.10 - MEMS research applications and results, Steve Arscot, IEMN

- Looking towards the next generation of MEMS devices, Dr.Eric Mounier Senior Analyst, MEMS Devices & Technologies, Yole Développement

11.40-12.10 - A microwave induced remote afterglow reactor for the deposition of Organosilicon plasma polymers, Garrett Curley, IEMN, France

12.10 -13.30 - Lunch

13.30-14.00 - Supporting Oxford Instruments Systems, Diane Nichols, Oxford Instruments

14.00-14.30 - Transformational Electronics – A Powerful Futuristic Paradigm On and For Oxford Instruments, Galo Torres Sevilla, Integrated Nanotechnology Lab, King Abdullah University of Science and Technology, Saudi Arabia

14.30 -14.45 - Break & posters

14.45-15.15 - Etch and Deposition Plasma Processes for MEMS and TSV, Mark McNie, Oxford Instruments

15.15-15.05 - MEMS & NEMS Micro-technological processes for sensors, energy harvesting and energy management, Professor Laurent Montes, Associate Prof, Grenoble INP

15.05-15.30 - Questions and close

To make a booking or for further information on this seminar please contact: www.oxford-instruments.com/MEMS-IEMN
Tel: +44 1934 837000

There is no charge for this seminar, but advance booking is essential

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