Researchers in Japan have devised a microelectromechanical system (MEMS) fabrication technology using printing and injection molding, fabrication of large-area devices with low capital investment, without a vacuum process, and lower production costs.
Thus, MEMS devices can be made and applied for fields where manufacturing cost has been an issue, such as lighting.
The team from the Research Center for Ubiquitous MEMS and Micro Engineering of the National Institute of Advanced Industrial Science and Technology (AIST) integrated microfabrication technology and MEMS design evaluation technology, and combined it with Design Tech Co. Ltd.'s signal processing technology to fabricate a lighting device.
Conventional commercial MEMS devices use fabrication techniques with semiconductor manufacturing systems used to produce integrated circuits, including vacuum processes. Resins could be used to form patterns onto moving microstructures but production costs are high due to vacuum-based processes. Also, it has proven difficult to form and thin MEMS structures such as springs and cantilevers because resins harden immediately after mold injection.
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