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Nov 22nd, 2012
Low-cost MEMS fabrication technology using a replica molding technique
(Nanowerk News) Kazuma Kurihara and Hideki Takagi, large scale integration team, the research center for Ubiquitous MEMS and Micro Engineering of the National Institute of Advanced Industrial Science and Technology (AIST), have developed a microelectromechanical systems (MEMS) device fabrication technology that uses only printing and injection molding.
This has been achieved by integrating the microfabrication technology and the MEMS design evaluation technology of AIST. A lighting device has been fabricated by combining the signal processing technology of Design Tech Co., Ltd. with the developed technology. The developed technology makes it possible to fabricate MEMS devices by using the printing technology that enables the fabrication of large-area devices without a vacuum process and the injection-molding technology that requires small capital investment and enables low production costs. MEMS devices currently produced by using semiconductor manufacturing processes can now be fabricated inexpensively and with a small capital investment. This allows the applications of MEMS devices in fields where MEMS cannot currently be used owing to high production costs and low production volumes. For example, new applications in the lighting industry can be developed by combining active variable light distribution by a MEMS mirror and LED lighting. MEMS devices fabricated by using this technology were presented at the Micromachine/MEMS Exhibition held at Tokyo Big Sight (Koto-ku, Tokyo) from July 11 to 13, 2012 and at AIST Open Lab held at AIST Tsukuba from October 25 to 26, 2012.
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