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Apr 26th, 2012
Manz steps up integration of c-Si production process with new wet-chemical tool
Manz AG will show new equipment for wet-chemical processing of crystalline silicon solar cells at SNEC 2012 fair in Shanghai this May.
Purpose of the tool named IPSG CEI 4800 is to remove the highly doped layer from the backside and the edges of a wafer and thereby produce a chemical edge isolation (CEI). In a second process step the remaining phosphor silicate glass (PSG) layer on the front side of the wafer that was created during the previous diffusion process step, is removed. The newly developed soft sponge roller process concept enables faster inline transportation speeds and ensures at the same time higher process stability combined with gentle wafer handling.
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