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May 2nd, 2013
New NIST measurement tool is on target for the fast-growing MEMS industry
As markets for miniature, hybrid machines known as MEMS grow and diversify, the National Institute of Standards and Technology (NIST) has introduced a long-awaited measurement tool that will help growing numbers of device designers, manufacturers and customers to see eye to eye on eight dimensional and material property measurements that are key to device performance.
The NIST-developed test chips (Reference Materials 8096 and 8097) are quality assurance tools that enable accurate, reliable comparisons of measurements on MEMS (MicroElectroMechanical Systems) devices made with different equipment and by different labs or companies. These capabilities will make it easier to characterize and troubleshoot processes, calibrate instruments and communicate among partners.
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