Leading integrated laser company will also use manufacturing tool for compound semiconductor etching.
Oxford Instruments Plasma Technology (OIPT), one of the world’s key manufacturers of plasma etch and deposition systems, has just received an order from Nanoplus in Germany for an ion beam deposition and a plasma etch system for use on novel types of semiconductor laser production.
Nanoplus produces semiconductor lasers over several wavelength ranges (some exclusively) for many different customers with a wide range of applications. The Ionfab300 Plus ion beam deposition is a multi-batch cassette loading tool allowing many devices to be produced for several applications and various customers in one load.
The Ionfab300 Plus will be used for laser bar facet coating with anti-reflective and high-reflection multilayers, and the PlasmaPro System100 RIE system will be used for GaAs and InP compound etching.
Dr David Pearson, OIPT’s Senior Ion Beam Technologist, comments, “Our Ionfab optical coating tools are becoming the tools of choice for many types of precision optical coatings worldwide, in particular in laser applications.”
“Nanoplus is an internationally leading supplier of single mode DFB lasers for sensing, metrology, spectroscopy and telecom applications. We even have one of our sensors on NASA’s Mars Curiosity Rover.’, commented Prof. Dr. Alfred Forchel, founder of Nanoplus, ‘We chose Oxford Instruments systems for their versatility, superior process capabilities and excellent customer support.”
Frazer Anderson, Business Group Director at Oxford Instruments said, “Our tools offer the ideal platform for production as well as research & development in many new application areas, and Laser Bar facet coating is just one of these. Our excellent process applications team and global service support ensure that our customers are supported in every respect and can count on their Oxford Instruments systems for maximum uptime and reliability.”