OEM Group Inc., equipment solution providers to worldwide makers of Silicon, MEMS, LED, RFID, Power Devices, and Photovoltaic devices, announced today the addition of foundry services to their offerings.

Beginning immediately, OEM Group will support the AlN market by offering high-quality AlN foundry services performed in the applications lab of its Gilbert, Arizona headquarters.

Included in the recent acquisition of the Thin Films and PVD product lines from Tegal Corporation, the OEM Group foundry services utilizes the SFI Endeavor AT PVD platform to produce piezoelectric AlN films on a variety of 4" to 6" wafers used in SAW, BAW, FBAR, and MEMS.  Equipped with a dual cathode AC power S-Gun magnetron, the Endeavor AT PVD cluster tool possesses proven advanced sputter technology guaranteed to produce superior film crystallinity, uniformity, and precise stress adjustment.  OEM Group also participates in customer R&D projects by assisting to optimize devices and technology as well as developing deposition processes suited for specific customer requirements.

PVD Process Development Manager for OEM Group, Valeriy Felmetsger says, "Performance of AlN-based electro-acoustic devices such as BAW and FBAR filters, oscillators, and resonating sensors is substantially tied to thin film technology. As of today, reactive magnetron sputtering is a method of choice enabling formation of AlN films with a high degree of c-axis texture and thus a strong piezoelectric response. In mass production, the most important criteria of advanced reactive sputtering are process stability and repeatability of the film properties from run to run, and independent control of the film properties such as crystal orientation, thickness, uniformity, and stress.  The SFI Endeavor AT PVD system is ideal for customers needing deposition of film stack, two-step deposition, or deposition of single AlN films."

Wayne Jeveli, President of OEM Group adds, "We have widened our breadth of products and services to move beyond tool manufacturing.  Our foundry services are a logical next step given our infrastructure, equipment, and expertise.  Our foundry service’s success is based on the reliable well developed technology we possess and we know customers can trust; careful analysis by our experts of all technical requirements and precise process adjustments to satisfy these requirements; and our professional reputation based on comprehensive hands-on experience in sputtered films technology."

About OEM Group

EM Group provides new and remanufactured front-end equipment to worldwide makers of Silicon Devices, as well as emerging applications such as MEMS, LED, RFID, Power Devices, and Photovoltaic.  Having completed over 1,300 projects since 1999, OEM Group's proven Remanufacturing procedures provide the production performance and process confidence today’s Fabs require.  With the recent addition of the exclusive manufacturing rights of the Tegal 900ACS™-Series and 6500™-Series Thin Film Etch, the Sputtered Films Endeavor™ PVD, and AMS™ PVD product lines, OEM Group continues to increase their LEGENDS™ portfolio which also includes the MRC Eclipse (PVD), AG Heatpulse® (RTP), Varian Sunset [Implant], and Lam AutoEtch™ (ETCH) product lines.
 
In addition to the LEGENDS™ line, OEM Group continues to be the global Remanufacturing leader of systems, chambers, and conversions for the Applied Materials® Endura®, Centura® and P5000; Mattson Aspen™ II; Lam Rainbow and Alliance; and Novellus Concept One® and Two platforms.  All Remanufactured systems include installation, start-up, and warranty support.