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May 10th, 2013
Optical metrology supplier, Zygo, receives large orders for advanced systems and components to support 450 mm semiconductor equipment development
Zygo Corporation (ZIGO) announced that it has received multiple orders for advanced metrology systems and optical components in support of 450 mm wafer systems development for OEM semiconductor equipment suppliers.
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Confidentiality agreements do not permit disclosure of customer information or amounts and specific nature of the products, but the aggregate of these orders has driven the Company's backlog to $88.9 million as of March 31, 2013, -- near record levels for Zygo Corporation. These orders will begin to ship during the first part of fiscal 2014.

The orders include advanced large aperture interferometer systems to support 450 mm wafer chuck and stage manufacturing by OEM suppliers, stage position sensing systems and OEM optical components for next generation semiconductor fabrication equipment.

John Stack, President of the Optical Systems Division commented, "Even during the significant downturn in the semiconductor industry, Zygo has been able to capture orders for forward-looking systems and optical components to support 450 mm semiconductor tool development as well as EUV optical components. While these orders are for early phase development, Zygo is well-positioned to benefit from future business as the industry migrates to support the fulfillment of Moore's Law."

Zygo Corporation is a worldwide supplier of optical metrology instruments, precision optics and electro-optical design and manufacturing services serving customers in the semiconductor capital equipment, bio-medical, scientific and industrial markets.



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