SPTS Technologies, a leading supplier of advanced wafer processing solutions for the global semiconductor industry and related markets, announced the receipt of a multi-system order from DigitalOptics Corporation (DOC), a wholly-owned subsidiary of Tessera, for Pegasus Rapier deep silicon etch and Primaxx HF Vapor release systems. These systems will be used to manufacture MEMS-based autofocus actuators for smart phone cameras.

Increasingly seen in high-end smart phones, DOC’s MEMS actuators are used to automatically position lens elements within cameras to provide fast, precise, and low power autofocus on the photo’s subject. Micromachined from silicon, successful production of these devices relies on the critical performance of the silicon etch module followed by the stiction-free HF vapor release of the micro-machined components.  Powered by a patented dual source configuration to produce uniform plasma density across the wafer, the Pegasus Rapier DRIE module creates high aspect-ratio features with exceptional profile uniformity and low tilt – key contributors to better device yields translating into cost savings per die. The patented Primaxx® HF vapor technology utilizes a “dry” etch environment ensuring stiction free release of the lens elements.

“Producing high-performance MEMS autofocus devices requires robust, repeatable and precise manufacturing,” said Tony Tang, PhD., GM DigitalOptics MEMS. “The Pegasus Rapier met our demanding profile uniformity and tilt goals at cost effective throughputs. These attributes are of critical importance as we commercialize our camera modules. In addition, as an existing user of the Primaxx® HF vapor system, we know it delivers the zero stiction, high yield performance we need.”

“SPTS continues to expand the use of our systems in major MEMS market applications, with smart phone imaging devices as one key growth area,” said Kevin T. Crofton, executive vice president and chief operating officer of SPTS. “This order confirms SPTS’s technology leadership across all areas of MEMS manufacturing.”
   
About SPTS Technologies
SPTS Technologies (a Bridgepoint portfolio company) designs, manufactures, sells, and supports etch, PVD, CVD and thermal wafer processing solutions for the MEMS, advanced packaging, LEDs, high speed RF on GaAs, and power management device markets. With manufacturing facilities in Newport, Wales, Allentown, Pennsylvania, and San Jose, California, the company operates across 19 countries in Europe, North America and Asia-Pacific.

For more information about SPTS Technologies, please visit www.spts.com
 
Company Contact: Evelyn Tay, Tel: +44 7885 70 6565, Evelyn.Tay@spts.com

About DigitalOptics Corporation
DigitalOptics Corporation, a wholly owned subsidiary of Tessera Technologies, Inc. (NASDAQ: TSRA), delivers innovation in imaging and optics with products and capabilities that enable expanded functionality in increasingly smaller devices. DigitalOptics Corporation's miniaturized camera module solutions provide cost-effective, high-quality camera features, including extended depth of field (EDoF), zoom, image enhancement, optical image stabilization and MEMS-based autofocus. These technologies can be applied to consumer electronic products as well as vertical markets such as, automotive, medical and security. The group also offers customized micro-optic lenses from diffractive and refractive optical elements to integrated micro-optical subassemblies. DigitalOptics Corporation is headquartered in San Jose, California. For information call 1.408.321.6000 or go to www.doc.com.