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Jul 12th, 2012
SUSS MicroTec launches ACS200 Gen3: The new generation 200 mm automated coater / developer platform
SUSS MicroTec, a leading supplier of equipment and process solutions for the semiconductor industry and related markets, launches the third generation of the ACS200 Coating and Developing Platform.
This newly developed tool offers an excellent mix of innovation and production proven technology components of the well-established ACS200Plus and Gamma platforms. The ACS200 Gen3 offers the capability to combine four wet process modules with up to 19 plates for high volume production.
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