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Mar 4th, 2014
SUSS MicroTec launches DSC300 Gen2: Next Generation Projection Scanner for Advanced Packaging
SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, has launched the DSC300 Gen2 projection scanner today.
SUSS MicroTec’s DSC300 platform for wafer sizes up to 300 mm is based on the projection lithography technology developed by SUSS MicroTec Photonic Systems Inc. (formerly Tamarack Scientific). The system combines the advantages of full-field exposure and conventional projection lithography. Equipped with a full-field mask and broadband projection optics, the scanner exposes the substrate in a single continuous mode (scanning). Additional functions can be integrated in designing the mask layout, for example exposure of substrate edges – an important requirement for subsequent process steps.
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