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Jul 10th, 2013
 
See the world's smallest telecentric lens system for machine vision from SCHOTT at Semicon West
 
SCHOTT, the international technology group and experts in the fields of specialty glass and glass-ceramics, will showcase a range of lighting and imaging components at Semicon West that can advance production processes for micro- and nano-electronics manufacturing.
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Products on display will include SCHOTT’s miniMML integrated vision unit, high-brightness ColdVision LLS 3 LED light source, and its IR-MEMS Inspector for examining silicon wafers in microelectromechanical systems (MEMS) manufacturing. SCHOTT will be exhibiting these products at Semicon West in San Francisco on July 9-11, 2013 at booth #515.

Featuring a 15-mm low-profile body, the miniMML integrates into one unit a telecentric lens, coaxial and oblique LED illumination, WVGA CMOS camera, LED power supply and controller, and all necessary cables. At 1/20 the size of conventional imaging setups, the miniMML eliminates the need for component selection and setting adjustment while offering near distortion-free performance with power and I/O over a locking USB-2.0 interface.

Another component crucial to inspection of manufacturing processes, as well as other applications, is the LLS 3. The ColdVision Series LLS 3 LED light source boasts high brightness, achieving 150W halogen lamp levels. Available in both cool and warm white color temperatures, this light source was designed to be coupled with high-quality fiber optic light guides for high-intensity and high-uniformity illumination. Its main applications include semiconductor, PCB, web, and other line scan inspection applications; high performance factory automation; pharmaceutical packaging inspection; and halogen replacement for energy and environmental initiatives.

SCHOTT’s IR-MEMS Inspector identifies defects during MEMS wafer manufacturing. The fine structures of such components are easily damaged by dust or micro-particles, and quality assurance is often difficult—use of microscopes is time-consuming and inaccurate, while a fully automated inspection is often prohibitive for smaller companies and fabs. The IR-MEMS Inspector unites sub-micron accuracy and the advantages of automated inspection by monitoring the infrared light given off by the silicon substrate used to construct the MEMS.

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