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Jun 18th, 2013
 
Technical Seminar to focus on Innovative Manufacturing Solutions for MEMS and Magnetic Sensors
 
Veeco’s Innovative Manufacturing Solutions for MEMS and Magnetic Sensors Technical Seminar will be held July 4, 2013 at Tokyo Big Sight, Room 604, from 1:30 – 4:00 pm.
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Industry experts will discuss manufacturing solutions for next generation MEMS and Magnetic Sensors, such as patterning of advanced piezoelectric devices and high rate deposition of magnetic materials. 

The surging demand for low cost sensors requires fabrication methods that are proven high volume manufacturing techniques.  In this seminar, we will focus on manufacturing innovations required for unique materials, such as:

• New deposition techniques that enable the deposition of soft magnetic materials such as Permalloy, for a variety of magnetoresistive MEMS applications.
• The ability to sputter at high rates while maintaining magnetic alignment
• Ion beam etch for patterning of advanced piezoelectric devices while maintaining critical dimensions.

For more information and to register, please click here

Agenda:

1:30- 1:45 pm:
Registration

1:45- 2:00 pm: 
Welcome/IntroductionMisao Suzuki, Sr. Manager, Nihon Veeco

2:00 -2:30 pm: 
Patterning of Advanced Piezoelectric Devices Using Ion Beam EtchKatrina Rook, Ph.D., IBE Engineering Manager, Veeco

2:30 – 3:00 pm: 
High Rate Deposition for Magnetoresistive MEMS Applications - Darin Howell, Sr. Product Manager, Veeco

3:00- 3:30 pm: 
MEMS Market OverviewLaurent Robin, Yole Développement

3:30 – 4:00 pm: 
Narrow track formation process for Hard Disk Magnetic Head using IBE/IBD/PVD Equipment - Dr. Okada Senior Manager, Head Technology, Japan Research Laboratory, HGST, a Western Digital company

4:00 pm: 
Reception 
   

 

 
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