Yole Développement is proud to publish a reverse costing report on the micro-bolometer ISC0601B, 320x240 pixels supplied by FLIR.

Flir micro-bolometer technology is based on a vanadium oxide material, with micro-machined structures. Each pixel contains active membranes suspended at 2µm above the readout circuit.


This micro-bolometer is suitable for various applications including thermography, industrial inspection, Building & Renewable Energy, Border Security and coastal surveillance, automotive, etc.

This report provides complete teardown of the Flir ISC0601B sensor with:

•  Detailed photos
•  Material analysis
•  Manufacturing Process Flow
•  In-depth economical analysis
•  Manufacturing cost breakdown
•  Selling price estimation

The micro-bolometer is part of the FLIR i7 thermal imaging camera. A reverse costing report on the i7 camera is available separately.

Glossary

1. Overview / Introduction…………………….…........…4

Glossary
Executive Summary
Reverse Costing Methodology

2. Company Profile…………....…………………………...6

Flir Profile
On Semiconductor

3. Physical Analysis………………………………......…...8

Synthesis of the Physical Analysis
IR Camera I7
Package                             14
Package X-ray
Package front side
Package rear side
Read Out IC                             27   
ROIC Functions
ROIC technology
Micro-Bolometer                             31
Reflector
Structure of Pixel
Microbridge
Contact structure
Compensation Pixels
Principle Operation
Physical data summary

4. Manufacturing Process Flow…………………………..….58

Global Overview
ROIC Process Flow        
Description of the ROIC Wafer Fabrication Unit
Micro-bolometer Process Flow        62
Description of the Micro-Bolometer Wafer Fabrication Unit
Packaging            73

5. Cost Analysis………………………………..…………..…..74

Main Steps of Economic Analysis
Yields Explanation
Die per wafer & Probe Test
ROIC Wafer Front-End Cost

6. 200mm Micro-Bolometer Cost Analysis……………..…..80

Micro-Bolometer Wafer Cost
Micro-Bolometer Step Cost
Micro-Bolometer Equipment Cost
Micro-Bolometer Consumable Cost
Back-End 1 : Packaging, Final test        86
Component Cost (FE + BE 0 + BE 1)        93
Yields Synthesis

7. Micro-Bolometer Price Estimation…….……………..…..96

Manufacturer Financial Ratios
Estimated Manufacturer Price
Synthesis of the cost analysis

Conclusion ………………………………….…………………101