This report from Glennan Microsystems Inc. & Yole Développement describes new developments and market opportunities for MEMS in harsh environments.
Until recently, MEMS devices were limited to standard environment use (T° < 150 °C, non-aggressive chemical exposure, controlled pressure, e.g.). Now, expanded applications are possible using new materials such as silicon carbide (SiC) or Silicon-on-Insulator (SOI). Compatible with standard MEMS processes, SiC or SOI devices offer improved performance.
Technologies and potential markets are presented in
- Defense, Aeronautics & aerospace
- Oil drilling
- Automotive
- Other Industry.
HE-MEMS can be characterized by the placement of integrated electronics:
- Electronics placed closer to the ultimate point of use (often in high temperature environments) to reduce weight, decrease connection complexity and improve reliability.
- Electronics placed in chemically corrosive or erosive environments to improve sensing capabilities and/or improve control (in chemical process plant or in marine environments).
- Electronics placed in extremely low (cryogenic) temperatures (in superconducting systems or space environments).
- Electronics placed in high radiation fields in space or for sensing and control functions in nuclear systems.
Defense, Aeronautics & aerospace
The primary application of MEMS in defense is acceleration measurement. The report details the projected number and type of MEMS acceleration sensors, gyroscopes for Inertial Measurement Units (IMU) and acceleration sensors for shock sensing. The report also details other products or concepts under development, such as the combination of pressure, temperature and acceleration sensors to make sensor arrays for mini climatic/environmental platforms.
The increased market for MEMS pressure sensors is also detailed in the report. For example 20 pressure sensors are used in the Airbus A320 but 200 pressure sensors are used in the Airbus A 380. MEMS pressure sensors are found to demonstrate very good reliability while driving the civil avionics trend to reduce maintenance costs.
Oil drilling industry
The major application of MEMS today in oil drilling is geophones. The report identifies the two leading companies manufacturing geophones and shows that markets are in the range of 60,000 devices per year, with a CAGR of 8%. The price per device, depending on specifications, is between 200 $ to 350 $.
Automotive industry
MEMS technologies are already well known in the automotive industry, where silicon microsystems have been implanted in airbag sensors, tire pressure measurement systems, active suspension systems or GPS applications. The report suggest how SiC MEMS would enable new harsh environment applications such as 1) high temperature pressure sensors for combustion chamber P measurement, 2) flow or pressure measurements anywhere on the motor and 3) exhaust gas analysis through measurement of CO, NO, NO2, H2, HC and NH3. SiC technology would also enable the use of alternate engine control technologies such as HCCI (Homogenous Charge Compression Ignition) technology.
Industrial applications
The report shows how the basic industrial sector (industry) represents a very high potential market for harsh environment MEMS sensors. Most promising is certainly the pressure sensor where a wide range of applications exist. Additionally, we find a niche market in gas sensors in boilers that can be an important first step for SiC commercialization.
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This report from Glennan Microsystems Inc. & Yole Développement describes new developments and market opportunities for MEMS in harsh environments.