MEMS Cosim+
MEMS MANUFACTURING COST SIMULATION TOOL
Evaluate the production cost of any MEMS process or device
from single chip to complex structures
Review the demo video of the tool here
A TOOL DESIGNED for THE MEMS COMMUNITY
- Due to their non-standard manufacturing process, the cost of MEMS devices can be difficult to estimate. Components such as accelerometers, pressure sensors, inkjet heads or micromirrors involve very different process steps.
- MEMS Cosim+ is a flexible tool ready to evaluate the cost of any MEMS process or complexed packaged device, already used by manufacturers as well as end users.
- With the possibility to store steps and process flows in libraries, this new version dramatically reduces the duration of the cost evaluation.
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MAIN FEATURES
Multiple process flows
- Any MEMS process flow can be simulated.
- Hierarchical description for multiple dies or processes.
- Simulate cost for a variety of different conditions (region, clean room class, process type, etc).
- Integrated equipment, wafer & materials databases.
- Possibility to store an unlimited number of process steps or process flows in libraries.
- Simulation of up to five simultaneous scenarios allowing the user to run sensitivity analysis and compare results like yield improvement, manufacturing location impact on cost, etc.
Multiple subcontracting operations
- Costs of usually externalized operations can be precisely evaluated by setting their individual regional and commercial parameters.
No admin privilege is required for setup
- MEMS Cosim+ is working from a single MS-Excel™ file and an external and sharable data file.
- Requires only basic MS-Excel ™ or MS-Office™ suite (from 2003 to 2010 release)
Results are fully open-format
- You can modify or export final results, and build reports your own style as with any Excel workbook.
Workgroup-compliant, safely
- All the data managed by IC Price+ are stored in an external MS-Access™ database file. Data cannot be read from the single Excel file and access rights to the database are needed. Multiple access, data sharing and data integrity are secured.
WORKING WITH MEMS COSIM+

PRODUCT DESCRIPTION
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MEMS COSIM+ DATABASES
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OPTIONAL LIBRARIES
MEMS Components:
MC11 - Bosch Sensortec BMA180 3-axis accelerometer
MC12 - Bosch Sensortec BMA250 3-axis accelerometer
MC13 - STMicroelectronics LIS331DLH 3-axis accelerometer
MC14 - STMicroelectronics LIS3DH 3-axis accelerometer
MC15 - Kionix KXTE9 3-axis accelerometer
MC16 - ADI ADXL278 2-axis accelerometer
MC21 - InvenSense IDG-1004 2-axis gyroscope
MC22 - Epson Toyocom X3500W 2-axis gyroscope
MC23 - InvenSense IDG-600_650 2-axis gyroscope
MC24 - InvenSense ITG-3200 MEMS 3-axis gyroscope
MC25 - STMicroelectronics L3G4200D 3-axis gyroscope
MC26 - SensorDynamics SD746 3-axis gyroscope
MC27 - VTI CMR3000 3-axis gyroscope
IMU:
MC31 - SensorDynamics SD746 6-axis inertial MEMS
MC32 - InvenSense MPU-6000 6-axis inertial MEMS
Pressure sensors:
MC41 - Freescale MPXY8300A MEMS TPMS
MC51 - Knowles SPM0408 MEMS Microphone
MC52 - STMicroelectronics MP45DT01 MEMS Microphone
MC53 - Analog Devices ADMP421 MEMS Microphone
MC54 - Knowles SPU04109LE5H MEMS Microphone
MC55 - Akustica AKU230 MEMS Microphone
MC56 - EPCOS T4000 MEMS Microphone
MC57 - AAC Acoustic iPhone 4 MEMS Microphone
MC58 - Knowles SPU0410LR5H MEMS Microphone
Oscillators:
MC61 - SiTime SiT8002 MEMS Oscillator
MC62 - Discera DSC8002 MEMS Oscillator
DMD:
MC71 - Texas Instruments DLP MEMS Digital Micro-mirror
MEMS Processes:
MP11 - STMicroelectronics THELMA process
MP12 - Bosch surface micromachining process
MP13 - Kionix dry micromachining process
MP14 - Analog Devices iMEMS process
MP34 - Analog Devices SOI micromachining process
MP15 - MEMSIC CMOS/MEMS process
MP16 - Freescale surface micromachining process
MP36 - Freescale HARMEMS process
MP17 - VTI 3D-MEMS process for automotive
MP37 - VTI 3D-MEMS with SOI process for automotive
MP18 - VTI 3D-MEMS process for consumer
MP19 - Sensonor bulk micromachining
MP21 - STMicroelectronics THELMA process
MP22 - Bosch surface micromachining process
MP23 - InvenSense Nasiri Process
MP24 - Epson Toyocom QMEMS process
MP25 - Silicon Sensing bulk micromachining process
MP26 - VTI 3D-MEMS with CSOI
MP27 - SensorDynamics PSM-X2 process
MP41 - Freescale CMOS/MEMS process
MP42 - Bosch APSM process
MP43 - Sensonor bulk micromachining process
MP44 - Denso bulk micromachining process
MP45 - Infineon CMOS/MEMS process
Microphones:
MP51 - Knowles SiSonic MEMS process
MP52 - Omron micromachining process
MP53 - Analog Devices micromachining process
MP54 - Akustica CMOS/MEMS process
MP61 - SiTime MEMS First process
MP62 - Discera micromachining / Silex Microsystems TSI process
MP71 - Texas Instruments DLP process
MP81 - HP inkjet head process