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InvenSense ICM-20789: High Performance 6-Axis Motion Sensor and Pressure Sensor Combo

3 490 €

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Motion sensor Invensense, motion and pressure sensor

World’s first ‘7-Axis’ motion tracking device targeting drone application

Having supplied Apple for many years, InvenSense (TDK) is a leader in the inertial measurement unit (IMU) market. It has a large market share, competing with Bosch and others.

This year, with the acquisition of Sensirion’s barometric pressure sensor division, InvenSense has entered a new market area. It has now released of its first ‘7-axis’ motion tracking combo, bringing together a 6-axis IMU and a pressure sensor, moving it into drone applications. 

6 axis sensor and pressure sensor InvenSense ICM20789, 7 Axis Combo Sensor Pressure

The ICM-20789 7-axis combo sensor released by InvenSense features a 6-axis device, incorporating a 3-axis gyroscope and a 3-axis accelerometer, and a barometric pressure sensor previously developed by Sensirion in the same package.

Compared with the stand-alone sensor hub, this approach eliminates a package and minimizes board area requirements.

6 axis motiona dn pressure sensor InvenSense ICM20789

The pressure sensor’s MEMS capacitive architecture provides the industry’s lowest noise at the lowest power. Combined with the motion-tracking 6-axis inertial sensor in a small footprint, the device is ideal for a wide range of motion tracking applications.

The inertial MEMS sensor is fabricated with a minimal number of masks and is directly assembled on the application-specific integrated circuit (ASIC) by eutectic bonding.

Using knowledge obtained by acquiring Sensirion’s pressure sensor division, InvenSense was able to design its own pressure sensor. The device is shipped in a 4 mm x 4 mm x 1.37 mm land grid array (LGA) package.

6 axis sensor motion, pressure, combo sensor InvenSense ICM20789

This report includes a detailed technology and cost analysis of the ICM-20789 7-axis motion tracking device. A comparison with the previous generation of combo sensors from InvenSense is also included in the report.

Table of contents

Overview / Introduction


Company Profile and Supply Chain

Physical Analysis

> Package
- Package views and dimensions, opening and cross-section

> Pressure Sensor Die
- View, dimensions, and marking
- Delayering and process
- Cross-section

> MEMS Die
- View, dimensions and marking
- Cap removed
- Sensing area
- Cross-sections of the sensor, cap, and seal

> ASIC Die
- View, dimensions, and marking
- Delayering and process
- Cross-section


Manufacturing Process Flow

> ASIC front-end process and wafer fabrication unit
> Pressure sensor process flow and wafer fabrication unit
> MEMS process flow and wafer fabrication unit
> Packaging process flow and assembly unit







Cost Analysis 

> Yield hypotheses
> Pressure sensor front-end cost
> Pressure sensor back-end 0: probe test and dicing
> Pressure sensor front-end cost per process steps
> Pressure sensor wafer and die cost
> ASIC front-end cost
> ASIC back-end 0: probe test and dicing
> ASIC wafer and die cost
> MEMS front-end cost
> MEMS back-end 0: probe test and dicing
> MEMS front-end cost per process steps
> MEMS wafer and die cost
> Back-end: packaging cost
> Back-end: packaging cost per process steps
> Back-end: final test cost
> IMU component cost


Estimated Price Analysis 


Comparison with InvenSense IMU MP-67B, Sensor Hub ICM-30360 and iPhone 7 Plus OIS IMU 













About the authors


System Plus Consulting specializes in the cost analysis of electronics, from semiconductor devices to electronic systems.

Created more than 20 years ago, System Plus Consulting has developed a complete range of services, costing tools and reports to deliver in-depth production cost studies and estimate the objective selling price of a product.

System Plus Consulting engineers are experts in:

  • Integrated Circuits 
  • Power Devices & Modules 
  • MEMS & Sensors
  • Photonics 
  • LED 
  • Imaging 
  • Display 
  • Packaging 
  • Electronic Boards & Systems.

Through hundreds of analyses performed each year, System Plus Consulting offers deep added-value reports to help its customers understand their production processes and determine production costs. Based on System Plus Consulting’s results, manufacturers are able to compare their production costs to those of competitors.

System Plus Consulting is a sister company of Yole Développement.

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  • Detailed photos

  • Precise measurements

  • Material analysis

  • Manufacturing process flow

  • Supply chain evaluation

  • Manufacturing cost analysis

  • Estimated sales price

  • Comparison between InvenSense’s previous custom IMUs in the iPhone 7, in the iPhone 6S and the ICM-30630 device