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Silicon Sensing CMS300 Z-Axis Gyro & 2-Axis Accelerometer

3 290 €

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Silicon Sensing flyerSilicon Sensing Combo Sensors for Automotive & Harsh Environments

Silicon Sensing CMS300 is a combo sensor device used in automotive and industrial applications. The CMS300 presents a unique Gyro ring structure covered by piezoelectric film actuator/ transducers and suspended on the ASIC die by a pedestal. The accelerometer has a very specific structure with glass layers and TGV to compact the final size.

Silicon Sensing CMS300 is part of the Orion Family combined accelerometer and gyroscope sensor devices used in tough environments. The component has excellent bias over temperature, high shock and vibration rejection and combines single-axis angular rate and dual-axis linear acceleration measurement.

Silicon Sensing proposes a 10.4x6.0x2.18mm device. The device presents one ASIC, one MEMS GYRO and one MEMS ACCELERO stacked on a ceramic substrate and connected by wire bonding.
The CMS300 features independent acceleration and angular rate sensing elements designed by Silicon Sensing and manufactured in Sumitomo Precision Products fab in Amagasaki, Japan.

The Gyroscope is a unique patented ring manufactured using DRIE Bulk process and composed of piezoelectric film actuators/transducers. The accelerometer element consists of one-piece resonating silicon MEMS structure anodically bonded to top and bottom glass substrates and connected by TGV (Through Glass Vias). A single ASIC produced with an CMOS 0.35µm process is used.

The report includes a comparison with Murata SCC2000 Series X or Z-Axis Gyro & 3-Axis Accelerometer.


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Table of contents

Overview / Introduction


Physical Analysis

> Physical Analysis Methodology
  - Package Marking & Pin Out
  - Package Bonding
  - Package Opening
  - Package Cross-Section

  - Package Marking & Pin Out
  - Delayering & process identification       
  - PCross-Section

MEMS Die Accelero
  - View, Dimensions & Marking
  - MEMS Cross-Section
  - Process Characteristics
  - Silicon Sensing Patents

> MEMS Gyro Die

  - View, Dimensions & Marking
  - MEMS Piezoelectric film
  - MEMS Pedestal
  - Cross-Section
  - Process Characteristics
  - Silicon Sensing Patents


Comparison with Murata’s SCC2000





















Manufacturing Process Flow

Global Overview
MEMS Process Flow
Wafer Fabrication Unit
Packaging Process Flow
Package Assembly Unit 


Cost Analysis

Yields Hypotheses
ASIC Front-End Cost
ASIC Probe Test & Dicing Cost
ASIC Wafer & Die Cost
MEMS Gyro Wafer & Die Cost
MEMS Accelero Front-End Cost
MEMS Accelero Front-End Cost per process steps
MEMS Accelero Probe Test & Dicing Cost
MEMS Accelero Wafer & Die Cost
Back-End : Packaging Cost
Back-End : Final Test & Calibration Cost
CMS300 Component Cost


Price Analysis

Estimated Selling Price
CMS300 Selling Price Estimation



Across the Enterprise, from marketing to purchasing and R&D, product manufacturing cost is a major factor which has to be measured and then optimized. Since 1993, System Plus Consulting’s mission has been to develop and sell the right tools and services to meet these costing requirements.

System Plus Consulting utilizes an engineering approach to cost. Cost models and technology expertise are combined to provide customers with an accurate and objective estimation of manufacturing costs and selling prices.

Headquartered in Nantes, France, System Plus Consulting is specialized in technology and cost analysis of electronic components and systems. During our 20 years in business, we have built and refined detailed cost models as the primary tools for hundreds of analyses. The highly qualified System Plus cost engineers combine broad and deep skills in semiconductor and electronics technologies with years of experience in cost modeling.

We offer:
− Custom reverse costing analyses: technology analysis followed by cost evaluation
− Standard reverse costing reports: regular publications on innovative products (available from our catalogue)
− Costing tools: software tools combining models and data to perform cost analysis

System Plus Consulting analyzes any type of electronic devices and systems, with a special focus on semiconductor technologies. Major fields of technology and cost expertise are:
− Integrated Circuits
− Power Devices and Modules
− MEMS & Sensors
− Photonics: LED, Image Sensors
− Packaging including wafer level
− Electronic Boards and Systems

Our analyses are used by Purchasing Departments to measure their suppliers’ cost structure, R&D Departments to confirm technological choices depending on their impact on costs, and Benchmarking/Marketing Departments to monitor the products on the market.

System Plus Consulting is committed to provide a high level of service:
− Delivery of reports and custom analyses with a minimum lead time.
− Results presentation and online Q&A sessions when support is needed.
− Open methodology and full confidentiality in order to maintain a trustful collaboration.

Since 2008, our partnership with YOLE Développement has allowed us to stay at the forefront of technologies and has added a market view to our reports.

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  • Detailed Photos

  • Precise Measurements

  • Material Analysis

  • Manufacturing Process Flow

  • Supply Chain Evaluation

  • Manufacturing Cost Analysis

  • Selling Price Estimation

  • Comparison of SCC2000 Combo Sensor