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Rohm SiC MOSFET Gen3 Trench Design Family

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Rohm SiC MOSFET Gen3 family

Trench technology in Rohm 650V and 1200V SiC MOSFETs.


The SiC device market is promising, with a compound annual growth rate (CAGR) of 31% from 2017-2021. This will increase to 44% to 2022 due to expansion among automotive and industrial applications. In total, the SiC market will exceed $1.5B in 2023.

Rohm is the second-placed company in SiC MOSFET discrete devices and modules, offering a wide range of devices from 650V-1700V. Just seven years after starting commercial SiC production, Rohm has launched its trench SiC MOSFET, becoming the first player commercially producing this type of technology.


Rohm SiC MOSFET Gen3 family


This product family is based on its proprietary double trench design, which includes the gate trench and the source trench. This design reduces the on-resistance (Rdson) by almost half with respect to a planar SiC device and increases current density almost fivefold with respect to a silicon IGBT with the same voltage.

Rohm includes the Gen3 design in 650V and 1200V devices in discrete or module packaging. The report goes into depth in its analysis of the Gen3 trench MOSFETs at 650V and 1200V, with optical and scanning electron microscope (SEM) images of the complex SiC trench structure.

It also includes production cost analysis of the SCT3120AL discrete device and of the MOSFET die of the BSM180D12P3C007 module. In addition, the report provides comparisons between 650V and 1200V Gen3 technology devices and between Rohm’s Gen3 and Gen2 SiC MOSFETs.


  Rohm SiC MOSFET Gen3 family SP18428 Rohm SiC MOSFET Gen3 family image2 Rohm SiC MOSFET Gen3 family















Table of contents


> Executive Summary

> Reverse Costing Methodology

> Glossary

> SiC Power Device Market



Company Profile

> Rohm

> Portfolio

> Supply Chain



Physical Analysis

> Summary of the Physical Analysis

> 650V MOSFET: SCT3120AL

- MOSFET die view and dimensions

- MOSFET delayering and main blocks

- MOSFET die process, cross-section and process characteristic

> 1200V MOSFET: BSM180D12P3C007

- MOSFET die view and dimensions

- MOSFET delayering and main blocks

- MOSFET die process, cross-section and process characteristic
















































Manufacturing process flow

> MOSFET Die Front-End Process

> MOSFET Fabrication Unit

> Packaging Process and Fabrication Unit



Cost Analysis

> Summary of the Cost Analysis

> Yields Explanation and Hypotheses

> 650V MOSFETs : SCT3120AL

- MOSFET die front-end cost

- MOSFET die probe test, thinning and dicing

- MOSFET die wafer cost

- MOSFET die cost

- Assembled components cost

- Component cost

> 1200V MOSFETs : BSM180D12P3C007 

- MOSFET die front-end cost, probe test, thinning and dicing, wafer cost and cost



Selling Price SCT3120AL


Comparison Between ROHM’s 3G SiC Trench 650V and 1200V MOSFETs


Comparison with Infineon’s Trench MOSFET design


About the authors


System Plus Consulting specializes in the cost analysis of electronics, from semiconductor devices to electronic systems.

Created more than 20 years ago, System Plus Consulting has developed a complete range of services, costing tools and reports to deliver in-depth production cost studies and estimate the objective selling price of a product.

System Plus Consulting engineers are experts in:

  • Integrated Circuits 
  • Power Devices & Modules 
  • MEMS & Sensors
  • Photonics 
  • LED 
  • Imaging 
  • Display 
  • Packaging 
  • Electronic Boards & Systems.

Through hundreds of analyses performed each year, System Plus Consulting offers deep added-value reports to help its customers understand their production processes and determine production costs. Based on System Plus Consulting’s results, manufacturers are able to compare their production costs to those of competitors.

System Plus Consulting is a sister company of Yole Développement.

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  • Detailed photos

  • Precise measurements

  • Manufacturing process flow

  • Supply chain evaluation

  • Manufacturing cost analysis

  • Selling price estimate
  • Comparison between between 650V and 1200V Gen3 devices

  • Comparison with Infineon trench MOSFET design